Hot Filament CVD Film Deposition Device MPHF
It is a compact tabletop CVD surface treatment device equipped with a hot filament (hot wire).
The W filament installed near the sample can be heated up to 2000°C, promoting the decomposition of various reaction gases. The active species (radicals) generated by gas decomposition accumulate on the sample surface to form a film.
- Company:マイクロフェーズ
- Price:Other